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Wordcount: 803
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Factory automation
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Automation is commonly defined as the hardware and
software systems that are integrated into the manufacturing
process to reduce the level of manual operation.
Automation can be subdivided into two parts; information
automation and material automation. Information automation
is associated with the execution of process steps by a
manufacturing execution system (MES), communication
connections and monitoring of the process equipment for
recipe and process management, and material identification
and tracking. Material automation is generally associated
with moving work-in-progress (WIP) containers (FOUPs, SMIF
pods, WIP boxes) to the process tool or to and from a
storage location, and movement of wafers within the proc
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